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Coated Graphite Article And Reactive Ion Etch Manufacturing And Refurbishment Of Graphite Article

机译:涂层石墨制品和活性离子刻蚀制造及石墨制品的翻新

摘要

In accordance with an embodiment of the invention, there is provided a coated graphite article. The article comprises graphite; and a conductive coating overlaying at least a portion of the graphite. The conductive coating comprises a through-thickness resistance of less than about 50 ohms as measured through the thickness of the graphite and the conductive coating. In accordance with another embodiment of the invention, there is provided a method for manufacturing a graphite article comprising a conductive coating. The method comprises treating graphite of the article with a reactive ion etch process; and after treating the graphite with the reactive ion etch process, applying the conductive coating over at least a portion of the graphite. In a further embodiment according to the invention, there is provided a method for refurbishing a graphite article comprising graphite and an overlaying conductive coating. The method comprises removing the overlaying conductive coating of the graphite article with a reactive ion etch process; and applying a new conductive coating over at least a portion of the graphite.
机译:根据本发明的一个实施方案,提供了一种涂覆的石墨制品。该制品包括石墨;和石墨。导电涂层覆盖至少一部分石墨。如通过石墨和导电涂层的厚度测量的,导电涂层包括小于约50欧姆的贯穿厚度电阻。根据本发明的另一个实施例,提供了一种用于制造包括导电涂层的石墨制品的方法。该方法包括通过反应性离子蚀刻工艺处理制品的石墨;在用反应性离子蚀刻工艺处理石墨之后,在至少一部分石墨上涂覆导电涂层。在根据本发明的另一个实施例中,提供了一种用于翻新包括石墨和覆盖的导电涂层的石墨制品的方法。该方法包括通过反应性离子蚀刻工艺去除石墨制品的覆盖的导电涂层。在至少一部分石墨上涂覆新的导电涂层。

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