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THREE DIMENSIONAL SUB-WAVELENGTH STRUCTURE WITH SURFACE PLASMON ENERGY MATCHING PROPERTIES

机译:具有表面等离子能量匹配特性的三维次波长结构

摘要

An apparatus including a three dimensional sub-wavelength structure for electromagnetic applications including a surface layer formed of a metal or semiconductor film, one or more additional layers stacked to the surface layer, one or more sub-wavelength apertures in the surface layer, and one or more cavities nearby the one or more sub-wavelength apertures. The size of each aperture is smaller than the wavelength of the electromagnetic field incident upon the three dimensional sub-wavelength structure. The one or more cavities provide accessibility for a dielectric material within and below each aperture. Each cavity may also contain at least one metal or semiconductor sub-wavelength particle. A method of fabricating a three dimensional sub-wavelength structure is also provided.
机译:一种设备,包括用于电磁应用的三维亚波长结构,包括:由金属或半导体膜形成的表面层;堆叠在该表面层上的一个或多个附加层;该表面层中的一个或多个亚波长孔;以及一个一个或多个亚波长孔附近的一个或多个腔。每个孔的尺寸小于入射在三维亚波长结构上的电磁场的波长。一个或多个空腔为每个孔之内和之下的介电材料提供可及性。每个腔还可以包含至少一个金属或半导体亚波长颗粒。还提供了一种制造三维亚波长结构的方法。

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