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Particle detection sensor, method for manufacturing particle detection sensor, and method for detecting particle using particle detection sensor
Particle detection sensor, method for manufacturing particle detection sensor, and method for detecting particle using particle detection sensor
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机译:粒子检测传感器,粒子检测传感器的制造方法以及使用该粒子检测传感器的粒子检测方法
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摘要
A compact sensor with which particles floating in the air can be easily detected. A sensor having a microstructure which detects a detection object by contact is used. A microstructure has an opening to be a detection hole corresponding to the size of a detection object, and a pair of electrodes having a bridge structure are provided thereabove or thereunder so as to partially contact with each other.
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