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Pattern recognition with edge correction for design based metrology
Pattern recognition with edge correction for design based metrology
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机译:基于边缘校正的模式识别,用于基于设计的计量
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摘要
A method for edge correction in pattern recognition includes generating a pattern recognition output for a pattern recognition process, including receiving, in the processor, a design layout, receiving a sample plan based on the design layout, receiving a first user-generated edge input, generating a pattern recognition recipe output from the design layout, the sample plan and the user-generated edge input, wherein the pattern recognition recipe output is configured to drive the pattern recognition process, generating a measurement model from the pattern recognition process, generating a measurement model pattern recognition output for an measurement model pattern recognition process, including receiving a second user-generated input and generating a measurement model pattern recognition recipe output from the measurement model and the second user-generated edge input, wherein the measurement model pattern recognition recipe output configured to drive the measurement model pattern recognition process.
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