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Simulating a chemical reaction phenomenon in a semiconductor process
Simulating a chemical reaction phenomenon in a semiconductor process
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机译:模拟半导体工艺中的化学反应现象
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摘要
A calculating unit calculates either one of a reaction probability between a chemical species used in a semiconductor process and a semiconductor device and a deactivation probability of the chemical species, according to either one of a structure of the semiconductor device and a plurality of materials. A simulation unit performs a simulation of a physical phenomenon occurring in a reaction chamber based on either one of the reaction probability and the deactivation probability.
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