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Method for manufacturing quartz crystal unit and quartz crystal oscillator having the quartz crystal unit

机译:石英晶体单元的制造方法及具有该石英晶体单元的石英振荡器

摘要

A method for manufacturing a quartz crystal unit comprises disposing a metal film on a surface of a quartz crystal wafer, disposing a resist on the metal film, forming a tuning fork shape pattern on the surface, etching the quartz crystal wafer to form a quartz crystal tuning fork shape having a base and first and second tines, forming electrodes on opposite side surfaces of the first and second tines so that the electrode of the first tine has an electrical polarity opposite to an electrical polarity of the electrode of the second tine to form a quartz crystal tuning fork resonator that vibrates in a flexural mode of an inverse phase, removing the resist before forming the electrodes, mounting the tuning fork resonator on a mounting portion of the case, disposing a metal or a glass into a through-hole of the case, and adjusting an oscillation frequency of the tuning fork resonator.
机译:一种用于制造石英晶体单元的方法,包括:在石英晶体晶片的表面上布置金属膜;在金属膜上布置抗蚀剂;在该表面上形成音叉形状的图案;蚀刻石英晶体晶片以形成石英晶体。具有基尖和第一尖齿和第二尖齿的音叉形状,在第一尖齿和第二尖齿的相对侧表面上形成电极,使得第一尖齿的电极的极性与第二尖齿的电极的极性相反以反相弯曲模式振动的石英音叉谐振器,在形成电极之前去除抗蚀剂,将音叉谐振器安装在壳体的安装部分上,将金属或玻璃放置在外壳的通孔中并调节音叉谐振器的振荡频率。

著录项

  • 公开/公告号US8572824B2

    专利类型

  • 公开/公告日2013-11-05

    原文格式PDF

  • 申请/专利权人 HIROFUMI KAWASHIMA;

    申请/专利号US201113066422

  • 发明设计人 HIROFUMI KAWASHIMA;

    申请日2011-04-14

  • 分类号H01L41/22;

  • 国家 US

  • 入库时间 2022-08-21 16:44:40

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