首页> 外国专利> Asymmetric DBR pairs combined with periodic and modulation doping to maximize conduction and reflectivity, and minimize absorption

Asymmetric DBR pairs combined with periodic and modulation doping to maximize conduction and reflectivity, and minimize absorption

机译:非对称DBR对与周期性和调制掺杂相结合,以最大化传导和反射率,并最小化吸收

摘要

Methods for fabricating an optical device that exhibits improved conduction and reflectivity, and minimized absorption. Steps include forming a plurality of mirror periods designed to reflect an optical field having peaks and nulls. The formation of a portion of the plurality of minor periods includes forming a first layer having a thickness of less than one-quarter wavelength of the optical field; forming a first compositional ramp on the first layer; and forming a second layer on the compositional ramp, the second layer having a different index of refraction than the first layer and having a thickness such that the nulls of the optical field occur within the second layer and not within the compositional ramp, and wherein forming the second layer further comprises heavily doping the second layer at a location of the nulls of the optical field.
机译:用于制造具有改善的导电性和反射率以及最小化吸收的光学器件的方法。步骤包括形成多个镜周期,该镜周期被设计为反射具有峰值和零点的光场。形成多个次要周期的一部分包括:形成厚度小于光场波长的四分之一的第一层;以及形成第一层。在第一层上形成第一成分斜面;在组成斜面上形成第二层,该第二层的折射率与第一层的折射率不同,并且该第二层的厚度使得光场的零点出现在第二层内而不是在组成斜面上。第二层还包括在光场的零点位置重掺杂第二层。

著录项

  • 公开/公告号US8481350B2

    专利类型

  • 公开/公告日2013-07-09

    原文格式PDF

  • 申请/专利权人 RALPH H. JOHNSON;JAMES GUENTER;

    申请/专利号US201213537340

  • 发明设计人 RALPH H. JOHNSON;JAMES GUENTER;

    申请日2012-06-29

  • 分类号H01L21;

  • 国家 US

  • 入库时间 2022-08-21 16:43:58

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号