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Vectorial polarimetry method and apparatus for analyzing the three-dimensional electromagnetic field resulting from an interaction between a focused illuminating field and a sample to be observed
Vectorial polarimetry method and apparatus for analyzing the three-dimensional electromagnetic field resulting from an interaction between a focused illuminating field and a sample to be observed
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机译:矢量极化方法和装置,用于分析由聚焦照明场和待观察样品之间的相互作用产生的三维电磁场
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摘要
A method and apparatus for analysing the three-dimensional electromagnetic field resulting from an interaction between a focused illuminating beam and a sample to be observed, by characterising the distribution of the state of polarization of light across a measurement plane, the method comprising the steps of generating a beam of illuminating light; controlling the state of polarization at different positions across the beam width of the light beam; focussing said illuminating light beam to a focus, wherein said focus is a tight focus and said focused light has a suitable three-dimensional vectorial structure at the focus; detecting and measuring the state of polarization of the reflected light at different positions across the width of the measurement plane to retrieve information on the three-dimensional vectorial electromagnetic interaction of the illuminated focused field and the sample.
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