SUBSTRATES COATED WITH MIXTURES OF TITANIUM AND ALUMINUM MATERIALS, METHODS FOR MAKING THE SUBSTRATES, AND CATHODE TARGETS OF TITANIUM AND ALUMINUM METAL

摘要

Titanium and aluminum cathode targets are disclosed for sputtering absorbingcoatings of titanium and aluminum-containing materials in atmospherescomprising inert gas, reactive gases such as nitrogen, oxygen, and mixturesthereof, which can further comprise inert gas, such as argon, to formnitrides, oxides, and oxynitrides, as well as metallic films. The titanium andaluminum-containing coatings can be utilized as an outer coat or as one ormore coating layers of a coating stack.