NANOGENERATOR FOR SELF-POWERED SYSTEM WITH WIRELESS DATA TRANSMISSION

摘要

A generator (100) includes a substrate (110), a first electrode layer (112), a dense plurality of vertically-aligned piezoelectric elongated nanostructures (116), an insulating layer (118) and a second electrode layer (120). The substrate (110) has a top surface and the first electrode layer (112) is disposed on the top surface of the substrate (110). The dense plurality of vertically-aligned piezoelectric elongated nanostructures (116) extends from the first electrode layer (112). Each of the nanostructures (116) has a top end. The insulating layer (118) is disposed on the top ends of the nanostructures (116). The second electrode layer (120) is disposed on the insulating layer (118) and is spaced apart from the nanostructures (116).