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ION CONTENT MEASUREMENT DEVICE, ION CONTENT MEASUREMENT METHOD, AND ION GENERATION DEVICE
ION CONTENT MEASUREMENT DEVICE, ION CONTENT MEASUREMENT METHOD, AND ION GENERATION DEVICE
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机译:离子含量测定装置,离子含量测定方法及离子产生装置
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摘要
Provided are: an ion content measurement device that reduces the effect of leakage current and can highly precisely measure ion content; an ion content measurement method; and an ion generation device. The ion content measurement device has: a collection electrode (86) that collects ions generated by an ion generation unit (6); a measurement unit (87) that measures the potential of the collection electrode (86); and a CPU (81) that causes the ion generation unit (6) to be in an operating state for generating ions or a non-operating state for not generating ions. The ion content is calculated and measured on the basis of the difference between the measurement results of the measurement unit (87) during the period in which the ion generation unit (6) is in the operating state, and the measurement results of the measurement unit (87) during the period in which the ion generation unit (6) is in the non-operating state.
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