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STRUCTURE COLOUR OF PHOTONIC CRYSTALS, A METHOD OF MANUFACTURING THEREOF AND A MANUFACTURING APPARATUS THEREOF

机译:光子晶体的结构颜色,其制造方法及其制造装置

摘要

Provided are a structure color of photonic crystals in which a new structure of a structure color of photonic crystals is provided so that a nanoimprint process can be performed and mass productivity is improved, a method of manufacturing thereof, and a manufacturing apparatus thereof. The method of manufacturing a structure color of photonic crystals includes: forming a plurality of basic element layers by using nanoimprinting, the plurality of basic element layers comprising a plurality of basic unit bodies each having a symmetrical cross-section and thin film connecting portions connecting the basic unit bodies! sequentially stacking the basic element layers! removing the thin film connecting portions by using etching; and determining whether the structure color of photonic crystals is completed, wherein, when it is determined that the structure color of photonic crystals is not completed, the forming, the stacking, and the removing are repeatedly performed.
机译:提供了一种光子晶体的结构色,其中提供了一种新的光子晶体的结构色结构,从而可以进行纳米压印工艺并提高了批量生产率,其制造方法及其制造设备。制造光子晶体的结构颜色的方法包括:通过使用纳米压印形成多个基本元件层,所述多个基本元件层包括各自具有对称横截面的多个基本单元体和连接所述基本单元体的薄膜连接部分。基本单位的身体!依次堆叠基本元素层!通过蚀刻去除薄膜连接部分;确定光子晶体的结构色是否完成,其中,当确定光子晶体的结构色未完成时,重复进行形成,堆叠和去除。

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