PIEZOELECTRIC FILM, INKJET HEAD, METHOD FOR FORMING IMAGE USING INKJET HEAD, ANGULAR VELOCITY SENSOR, METHOD FOR DETERMINING ANGULAR VELOCITY USING ANGULAR VELOCITY SENSOR, PIEZOELECTRIC POWER-GENERATING ELEMENT, AND METHOD FOR GENERATING POWER USING PIEZOELECTRIC POWER-GENERATING ELEMENT

摘要

The purpose of the present invention is to provide an NBT-BT lead-free piezoelectric film having high crystal orientation performance and high ferroelectric properties. This piezoelectric film comprises an Na_xM_1-x layer and a (Bi, Na)TiO₃-BaTiO₃ layer. The (Bi, Na)TiO₃-BaTiO₃ layer is formed on the Na_xM_1-x layer. M represents Pt, Ir or PtIr, and x is a value between 0.002 to 0.02 inclusive. Both the Na_xM_1-x layer and (Bi, Na)TiO₃-BaTiO₃ layer have (001) orientation only, (110) orientation only, or (111) orientation only.