首页> 外国专利> P-TYPE OXIDE ALLOYS BASED ON COPPER OXIDES, TIN OXIDES, TIN-COPPER ALLOY OXIDES AND METAL ALLOY THEREOF, AND NICKEL OXIDE, WITH EMBEDDED METALS THEREOF, FABRICATION PROCESS AND USE THEREOF

P-TYPE OXIDE ALLOYS BASED ON COPPER OXIDES, TIN OXIDES, TIN-COPPER ALLOY OXIDES AND METAL ALLOY THEREOF, AND NICKEL OXIDE, WITH EMBEDDED METALS THEREOF, FABRICATION PROCESS AND USE THEREOF

机译:基于铜氧化物,锡氧化物,锡铜合金氧化物和金属合金以及镍氧化物的P型氧化物合金,其嵌入金属,制备工艺和用途

摘要

The present invention relates to thin films comprising non-stoichiometric monoxides of: copper (OCu2)x with embedded cubic metal copper (Cucy) [(OCu2)x+(Cu1-2)y, wherein 0.05x1 and 0.01y0.9]; of tin (OSn)x with embedded metal tin (Snx) [(OSn)z+(Sn1-2)w wherein 0.05z1 and 0.01w0.9]; CucxSnx alloys with embedded metal Sn and Cu [(OCuSn)a+(CuSn)b with 02 and 02, wherein 0.05a1 and 0.01b0.9]; and of nickel (ONi)x with embedded Ni and Sn species [(ONi)a+(NiSn)b with 02 and 02, wherein 0.05a1 and 0.01b0.9]; or combinations thereof, with amorphous, or nanocrystalline, or polycrystalline structure, either doped or not, with impurities such as zirconium, nitrogen or fluorine, for the fabrication of CMOS or TFT devices, with active matrices for LCD or OLED, fabrication of logic circuits, among others, using rigid or flexible substrates, wherein a protection layer, such as SU8 or the like, or silicon oxide or silicon nitride films are used for encapsulation.
机译:本发明涉及包含以下非化学计量的一氧化物的薄膜:铜(OCu 2)x和嵌入的立方金属铜(Cucy)[(OCu 2)x +(Cu 1-2)y,其中0.05 x <1和0.01 y0.9]。 ;锡(OSn)x与嵌入的金属锡(Snx)[(OSn)z +(Sn1-2)w,其中0.05z <1和0.01w0.9]的关系;具有嵌入的金属Sn和Cu ​​[(OCuSn)a +(CuSn)b,其中0 2和0 2,其中0.05a <1和0.01b0.9]的CucxSnx合金;以及具有嵌入的Ni和Sn物质[[ONi] a +(NiSn)b,其具有0 2和0 2,其中0.05a <1和0.01b0.9]的镍(ONi)x;或其组合,具有非晶态或纳米态或多晶结构(掺杂或未掺杂),杂质如锆,氮或氟,用于制造CMOS或TFT器件,具有用于LCD或OLED的有源矩阵,用于制造逻辑电路尤其是,使用刚性或柔性基板,其中将保护层(例如SU8等)或氧化硅或氮化硅膜用于封装。

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