LASER FOCUSING METHOD AND APPARATUS WITH CONTROL SYSTEM FOR CORRECTION OF THE OPTICAL ABERRATION

摘要

The present Application provides a laser focusing system in which a phase pattern of a laser fabrication signal is controlled to provide correction for optical aberration resulting from a refractive index boundary at a lateral edge of the sample. The lateral edge has distance to the laser focus which varies as the structure is fabricated, giving different degrees of overlap of the laser fabrication beam over the edge of the sample. This aberration correction enables focusing of a laser output right up to the edge of a sample.