DECONVOLUTION OF TIME-GATED CATHODOLUMINESCENCE IMAGES

摘要

A method for generating a cathodoluminescence image comprising the steps of: generating an intensity modulated charged particle beam; focusing said charged particle beam on a specimen; gating temporally the cathodoluminescence emitted by said specimen to provide time -gated cathodoluminescence; measuring the time-gated cathodoluminescence for different charged particle beam positions on the specimen to generate a cathodoluminescence image deconvoluting the cathodoluminescence image to improve the resolution of said cathodoluminescence image. The invention further provides devices for carrying out such methods.