The present invention, the base frame, a pair of Y sliders slidably arranged on both sides of the upper base frame and reciprocating in the Y-axis direction, both ends coupled to the upper pair of Y sliders in a gantry type (Gantry type) Specimen conveying unit, base frame and the Y stage, and the X stage which is arranged slidably with the Y stage while wrapping the upper surface and both sides of the Y stage to mount the object to reciprocate and transfer in the X-axis direction A first linear motor provided between the Y stage and transmitting the driving force to the Y stage, and a driving unit including the second linear motor provided between the Y stage and the X stage and transmitting the driving force to the X stage, The guide part for guiding the movement of the specimen transfer part, and is disposed between the Y slider and the Y stage, and the deformation by the Yaw motion of the Y stage Providing a stage comprising a flexible hinge mechanism to absorb. Therefore, it is possible to perform a large stroke by arranging the X stage and the Y stage in a gantry-H type hybrid structure, and the high precision performance can be secured by compensating the Yaw motion error through the flexible hinge mechanism. .
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