CLEANING APPARATUS USING AN ULTRASONIC OSCILLATOR WHICH OUTPUTS MULTIPLE ULTRASONIC WAVES, CAPABLE OF REDUCING MAINTENANCE COSTS FOR AN ULTRASONIC VIBRATION UNIT AND ULTRASONIC OSCILLATOR

摘要

PURPOSE: A cleaning apparatus using an ultrasonic oscillator which outputs multiple ultrasonic waves is provided to clean a glass substrate by vibrating a cleaning solution while an ultrasonic vibration unit receives 1-3MHz ultrasonic frequencies.;CONSTITUTION: A cleaning apparatus using an ultrasonic oscillator which outputs multiple ultrasonic waves comprises a first ultrasonic frequency oscillator and an ultrasonic vibration unit(50). The first ultrasonic frequency oscillator generates first ultrasonic frequencies by receiving oscillation control signals from a control unit(2). The ultrasonic vibration unit outputs the first ultrasonic frequencies of resonant frequencies, an inductance value of a first choke coil(26a), and a ceramic capacitor value of the vibration unit. The ultrasonic vibration unit cleans a glass substrate by vibrating a cleaning solution in a stainless container.;COPYRIGHT KIPO 2013;[Reference numerals] (18) Power unit; (2) Control unit; (20) Power amplifying unit; (22) Relay driving unit; (24a) First relay switch module; (24b) Second relay switch module; (24c) Third relay switch module; (26a) First Choke coil; (26b) Second choke coil; (26c) Third choke coil; (50) Ultrasonic vibration unit; (AA) From the small signal amplifying unit