VERTICAL AND HORIZONTAL MOVING APPARATUS WITH MECHANICAL INTENSITY CAPABLE OF MOVING A CHUCK TO A PRESET LOCATION IN HORIZONTAL AND VERTICAL DIRECTIONS

摘要

PURPOSE: A vertical and horizontal moving apparatus with mechanical intensity is provided to disperse the weight center of a Z axis receiving an eccentric load to a base frame by arranging two Z axis stages on the upper and lower sides thereof, respectively.;CONSTITUTION: A first horizontal driving unit(310) is mounted on a preset region of an upper surface of a base frame(300). The first horizontal driving unit moves along a first direction of a preset moving surface. A second horizontal driving unit(320) moves along a second direction of the moving surface which is vertical to the first direction. A top vertical driving unit includes a top body(332), a top body guide(334), a first motor(337), and a support stand(338). A bottom vertical driving unit includes a bottom body(342), a bottom body fixing member(344), a bottom driving module(346), and a second motor(347).;COPYRIGHT KIPO 2013;[Reference numerals] (AA) Electric test device