APPARATUS FOR DEPOSITING AN ORGANIC LAYER USING A JOULE-HEATING FOR MANUFACTURING A LARGE DEVICE AND AN APPARATUS FOR MANUFACTURING AN ORGANIC LIGHT EMITTING DISPLAY DEVICE USING THE SAME

摘要

PURPOSE: An apparatus for depositing an organic layer using a joule-heating and an apparatus for manufacturing an organic light emitting display device using the same are provided to reduce an organic material loss by forming the organic layer on a donor substrate with a wet process.;CONSTITUTION: A cleaning device(200) cleans a donor substrate. An organic material coating device(300) coats the donor substrate with organic materials. An electric field applying device(400) applies an electric field to the donor substrate with the organic materials. A load lock chamber(500) inputs or outputs the donor substrate to or from the electric field applying device. The load lock chamber includes a gate(510) in a donor substrate input location.;COPYRIGHT KIPO 2013;[Reference numerals] (AA,BB,CC) Donor substrate moving path; (DD) Inputting a device substrate