CONDUCTIVE OXIDATION MEMBRANE WITH EXCELLENT ELECTRIC PROPERTY BY FORMING THE COMPOSITE OF NICKEL OXIDE AND AZO BY A CHEMICAL METHOD AND A MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A conductive oxidation membrane is provided to have high luminous efficiency as a TCE to p-GaN by improving optical and electrical performance.;CONSTITUTION: A conductive oxidation membrane is a NiOx:AZO transparent composite conductive oxidation film which is manufactured by a sol-gel chemical method and consists of nickel oxide(NiO) and gallium-doped zinc oxide. The molar ratio of the NiO is 0.5-2.0 mol%. The concentration of aluminum doped to ZnO is 0.05-5 atom%/ The optical transmittance of the oxide film in 380-800 nm is 75-90%. The electric resistance of the oxide film is 2.07×10^(-3) - 2.39×10^(-1) Ωcm.;COPYRIGHT KIPO 2013