THERMAL TREATMENT APPARATUS, A TEMPERATURE CONTROL SYSTEM, A THERMAL TREATMENT METHOD, A TEMPERATURE CONTROL METHOD, AND A READABLE MEDIUM HAVING A PROGRAM FOR EXECUTING THE THERMAL TREATMENT METHOD OR THE TEMPERATURE CONTROL METHOD

摘要

PURPOSE: A thermal treatment apparatus, a temperature control system, a thermal treatment method, a temperature control method, and a readable medium having a program for executing the thermal treatment method or the temperature control method are provided to save power consumption.;CONSTITUTION: A substrate holding part(44) supports substrates at regular intervals. The substrates are arranged in a process chamber(65). A heating part(63) heats the process chamber. A feeding part(91) supplies gas. A cooling part(90) cools the process chamber.;COPYRIGHT KIPO 2013