TRANSPARENT GAS BARRIER FILM WITH INORGANIC COMPOSITION GRADIENT WITHOUT SUDDEN CHANGE OF PHYSICAL PROPERTIES BETWEEN LAYERS, AND A MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A manufacturing method of a transparent gas barrier film is provided to manufacture the transparent gas barrier film with inorganic composition gradient by only a simple plasma surface treatment without vacuum deposition of an organic-inorganic hybrid layer.;CONSTITUTION: A transparent gas barrier film is a substrate with 70% or more inorganic concentration. The transparent gas barrier film has an organic-inorganic hybrid section with inorganic composition gradient becoming lower toward the center of the substrate. A manufacturing method of the transparent gas barrier film comprises a step of preparing a substrate which includes silicon; and a step of treating the surface of the substrate with reactive gas plasma, to form the inorganic composition gradient.;COPYRIGHT KIPO 2013