IRRADIATING DEVICE WITH A LIGHT SOURCE IRRADIATING ULTRAVIOLET RAYS AND AN IRRADIATING METHOD IRRADIATING ULTRAVIOLET RAYS BY USING THE LIGHT SOURCE

摘要

PURPOSE: An irradiating device and an irradiating method are provided to control the temperature of gas supplied to a chamber body by a gas temperature controlling unit.;CONSTITUTION: An irradiating device comprises a light source and a chamber(61). The light source includes an amalgam alloy arranged in a portion of the inner surface of a light source pipe. The light source is arranged inside the chamber. The chamber includes a chamber body, a first gas inlet formed in the chamber body, and a first gas outlet formed in the chamber body. The outer surface of a portion where the amalgam alloy is arranged is arranged in a flow passage of a gas which flows in through the first gas inlet and becomes discharged through the first gas outlet.;COPYRIGHT KIPO 2013