ENVIRONMENT-FRIENDLY AIR CONDITIONING FILTER FOR SEMICONDUCTOR EQUIPPED WITH AN ACTIVATED CARBON FIBER AS FIBROUS ADSORBENT

摘要

PURPOSE: An environment-friendly air conditioning filter for semiconductor is provided to purify polluted air for a pleasant indoor space within a production facility and a working environment for workers, and to improve production facility and product quality.;CONSTITUTION: An environment-friendly air conditioning filter for semiconductor comprises an activated carbon fiber as fibrous adsorbent. The principal component of the activated carbon fiber is carbon. The activated carbon fiber is manufactured by plasticizing and reviving materials of natural fibers, artificial organic compounds and chemical fibers. The activated carbon fiber has the inner area of amorphous carbon with well-developed micro pores. The filter frame is securely manufactured with an aluminum material (2).;COPYRIGHT KIPO 2013