CELL INCLUDING A VIBRATOR WHICH VIBRATES IN A DIRECTION PERPENDICULAR TO A SUBSTRATE AND AN ELEMENT OF AN ULTRASONIC TRANSDUCER, AN ULTRASONIC TRANSDUCER INCLUDING THE SAME, AND A METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: A cell and an element of an ultrasonic transducer, an ultrasonic transducer including the same, and a method of manufacturing the same are provided to increase the amount of volume change of the elements and the average electrostatic force between a first substrate and a vibrator, thereby increasing the transmission output and receiving sensitivity of the elements.;CONSTITUTION: An ultrasonic transducer(10) includes a plurality of elements(12) of the ultrasonic transducer and at least one electric connection preventer(14) for preventing electric connection between the elements. The elements of the ultrasonic transducer is provided in an array of m x n. The electric connection preventer is provided among the elements and prevents electric connection between the elements in order to individually drive each of the elements.;COPYRIGHT KIPO 2013