POWER DISTORTION-BASED SERVO CONTROL SYSTEM FOR FREQUENCY TUNING RF POWER SOURCES CAPABLE OF SUPPLEMENTING FEEDBACK CONTROL USING FEEDFORWARD CONTROL

摘要

PURPOSE: A power distortion-based servo control system for frequency tuning RF power sources is provided to improve overall control performance of an RF power system.;CONSTITUTION: A power amplifier (20) outputs a wireless frequency to a matching circuit through a transmission line between the matching circuits. A distortion module (44) determines a first distortion value according to a sinusoidal function of a first sensor signal and a cross-correlation function of the first sensor signal. A first correction circuit (46) generates a first impedance tuning value based on the first distortion value and a first designated value. The first correction circuit provides feedforward control of impedance matching performed in the matching circuit including first impedance tuning value output to one of the power amplifier and the matching circuit.;COPYRIGHT KIPO 2013;[Reference numerals] (12) RF generator; (14) Matching circuit; (16) Load; (20) Power amplifier; (24) Power source; (26) Sensor; (28) Scaling module; (32) Power control module; (38) Power setpoint module; (44) First distortion module; (46) First correction circuit; (50) Impedance matching circuit; (52) Variable tuning module; (60) First input module; (64) Tuning control module; (70) Second distortion module; (72) Second correction circuit; (76) Load setpoint module; (80) Load control module; (90) Second sensor