ULTRASONIC CLEANING DEVICE FOR LARGE AREA PANELS, CAPABLE OF CLEANING THE PANELS WITH ULTRASONIC WAVES BY USING A WATER FILM AS A MEDIUM

摘要

PURPOSE: An ultrasonic cleaning device for large area panels is provided to reduce the consumption of cleaning solution as the cleaning solution is directly discharged from a gap between the panel and the lower surface of an ultrasonic vibration unit through a long discharging unit and a water film formed at the gap.;CONSTITUTION: An ultrasonic cleaning device (30) for large area panels comprises an ultrasonic vibration unit (32) and a cleaning solution supply unit (34). The ultrasonic vibration unit is formed in a longitudinal direction to be the same or greater than the width of a transferred panel (10) and both ends are fixed to both sides of a frame by a connecting member to be perpendicular in a transferring direction of the panel. The cleaning solution supply unit supplies the cleaning solution to a gap between the lower surface of the ultrasonic vibration unit and the surface of the panel and has a discharging unit which is the same or greater than the length of the ultrasonic vibration unit to form an even water film.;COPYRIGHT KIPO 2013