TREATMENT SOLUTION FOR PREVENTING PATTERN COLLAPSE IN FINE STRUCTURE BODY, AND PROCESS FOR PRODUCTION OF FINE STRUCTURE BODY USING SAME

摘要

PURPOSE: A treatment liquid prevents the collapse of pattern with high aspect ratio of a microstructure such as a micro machine. CONSTITUTION: A treatment liquid for preventing the pattern collapse of a metallic microstructure contains C6-18 alkyl group-containing alkyl phosphonic acid or the salt thereof, water, and a glycol-based solvent represented by chemical formula 1: HO(C2H4O)nR^1 or chemical formula 2: HO(C3H6O)mR^1. In the chemical formulas, R^1 is hydrogen atom or a C1-4 alkyl group; n is a number of 2-4; and m is an integer from 1-3. The treatment solution includes at least one metal of titanium, tantalum, or aluminum. The content of alkyl phosphoric acid is 0.1-10,000 ppm.