METHOD OF FABRICATING INDIUM TIN OXIDE NANO-ROD USING ELECTRON BEAM EVAPORATOR

摘要

The present invention does not require gas injection for oxidation reaction by manufacturing ITO nanorods using evaporated indium, tin and oxygen by irradiating electron beams with ITO pellets as targets using electron beam deposition equipment widely used in semiconductor processes. And a method for mass production of ITO nanorods at low cost. The method for producing ITO nanorods according to the present invention is to form ITO nanorods on a substrate using indium, tin and oxygen evaporated from the target by irradiating an electron beam to a target made of ITO oxide without using a reaction gas. It features.