VACUUM DIFFUSION BONDING APPARATUS CAPABLE OF VARYING A WORK SPACE ACCORDING TO THE SIZE OF AN OBJECT TO BE BONDED, THEREBY IMPROVING THE EFFICIENCY OF THERMAL ENERGY

摘要

PURPOSE: A vacuum diffusion bonding apparatus is provided to prevent a loss of thermal energy through an assembled portion between an insulating body and an insulating cover, and to improve use efficiency of thermal energy.;CONSTITUTION: A vacuum diffusion bonding apparatus includes a heat blocking member(120), two or more heating elements(130), an upper jig(140), and a lower jig(150). The heat blocking member includes an insulating body(121) enclosing a work space(S) and open at the top or bottom and an insulating cover(122) finishing the opening of the insulating body. The heating elements are arranged separately top and bottom within the work space to form a space for arranging the insulating cover. The upper and lower jigs are arranged in the vertical direction at the upper and lower side of the work space to support an object(O) to be bonded or to provide a pressing force.;COPYRIGHT KIPO 2013