首页> 外国专利> HIGH ETCH RESISTANT POLYMER HAVING AROMATIC RINGS, COMPOSITION CONTAINING THE SAME, AND METHOD OF PATTERNING MATERIALS USING THE SAME

HIGH ETCH RESISTANT POLYMER HAVING AROMATIC RINGS, COMPOSITION CONTAINING THE SAME, AND METHOD OF PATTERNING MATERIALS USING THE SAME

机译:具有芳族环,包含相同成分的高耐蚀性聚合物以及使用相同成分对材料进行涂饰的方法

摘要

PURPOSE: An aromatic ring-containing polymer and composition for resist lower layer are provided to minimize reflection between resist and backside layer and to ensure multi-etching resistance. CONSTITUTION: An aromatic ring-containing polymer contains a repeat unit of chemical formulas 1, 2, and 3. In chemical formula 1, R1 is selected from a group consisting of hydrogen, hydroxyl group, halogen group, substituted or non-substituted alkyl group, substituted or non-substituted aryl group, and substituted or non-substituted heteroaryl group; R2-R5 are same or different hydrogen, hydroxyl group, halogen group, substituted or non-substituted alkyl group, substituted or non-substituted aryl group, substituted or non-substituted hetero aryl group; and A is single bond, substituted or non-substituted arylene group, and substituted or non-substituted straight or branched alkylene group.
机译:目的:提供用于抗蚀剂下层的含芳环的聚合物和组合物,以最大程度地减少抗蚀剂和背面层之间的反射并确保耐多蚀刻性。组成:含芳环的聚合物包含化学式1、2和3的重复单元。在化学式1中,R 1选自氢,羟基,卤素,取代或未取代的烷基,取代或未取代的芳基和取代或未取代的杂芳基; R2-R5是相同或不同的氢,羟基,卤素,取代或未取代的烷基,取代或未取代的芳基,取代或未取代的杂芳基; A为单键,取代或非取代的亚芳基,取代或非取代的直链或支链亚烷基。

著录项

  • 公开/公告号KR101225946B1

    专利类型

  • 公开/公告日2013-01-24

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20080138774

  • 申请日2008-12-31

  • 分类号C08G61/10;C08G61;G03F7/004;

  • 国家 KR

  • 入库时间 2022-08-21 16:25:50

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