AIRBORNE DUST PARTICLES MONITORING DEVICE AND AIRBORNE DUST PARTICLES DETECTING METHOD USING THE SAME

摘要

PURPOSE: A particulate-matter detecting device and method using the same are provided to prevent accident or damage due to a particulate matter since the mass concentration of a particulate matter can be detected in real time using electrostatic attraction on a MEMS structure. CONSTITUTION: A particulate-matter detecting device comprises a MEMS sensor(120), a driving unit(140) and an optical interferometer(160). The MEMS sensor adsorbs a particulate matter using electrostatic force. The driving unit is attached to the MEMS sensor and makes it resonate. The optical interferometer detects the mass of the particulate matter using the displacement of the sensor due to the particulate matter, which is adsorbed to the MEMS sensor. The MEMS sensor comprises a MEMS structure(122) and an adsorptive electrode(124), which is attached to the MEMS structure and generates electrostatic force.