BETA-DIKETIMINATE LIGAND SOURCES AND METAL-CONTAINING COMPOUNDS THEREOF； AND SYSTEMS AND METHODS INCLUDING SAME

摘要

The present invention is a metal comprising at least one decade thymidine - sulfonate ligand-containing compounds, and the preparation of provides and how to use it. In certain embodiments, the metal-containing compounds as a substituent, at least one fluorine- - comprises at least one ligand having a group containing an organic carbonate thymidine decade. In certain other embodiments, the metal-containing compound is selected metal is known in the art as the substituent-containing compound of the - decade thymidine sulfonate ligands within one or more corresponding - decade having at least one aliphatic substituent selected to be higher than the degree of freedom and a thymidine sulfonate ligand. The compounds are metal using a vapor deposition method - may be used to deposit the containing layer. The vapor deposition system comprising a compound are also provided. The source of the - decade Timmy Nate ligands are also provided.