ELECTRODE PATTERN INSPECTION APPARATUS HAVING A T-TYPE SENSOR CAPABLE OF PERFORMING THE ELECTRIC TEST OF AN ELECTRODE PATTERN FORMED IN AN ACTIVE AREA AND A FAN OUT AREA BY ONE SCAN TASK

摘要

PURPOSE: An electrode pattern inspection apparatus having a T-type sensor is provided to improve the efficiency of glass panel production by drastically shortening the electric inspection time of an electrode pattern.;CONSTITUTION: An electrode pattern inspection apparatus having a T-type sensor includes a probe(120), a first sensor(130), and a second sensor(140). A probe applies an electric signal to an electric pattern formed in a glass panel. A first sensor detects whether an electric pattern formed in an active area is open or short by moving in the perpendicular direction of the electric pattern and receiving an electric signal transmitted through the electric pattern formed in the active area in a non-contact way. A second sensor detects whether an electric pattern formed in a fan out area is open or short by moving in the perpendicular direction of the electric pattern in connection with the first sensor and receiving an electric signal transmitted through the electric pattern formed in the fan out area in a non-contact way.;COPYRIGHT KIPO 2013