APPARATUS FOR TRANSFERRING A SUBSTRATE CAPABLE OF REDUCING REPAIR TIME AND COSTS

摘要

PURPOSE: An apparatus for transferring a substrate is provided to implement stability by screw-jointing a driving connection part and a substrate transferring shaft.;CONSTITUTION: A driving part (110) provides a driving force for transferring a substrate. A substrate transferring shaft (150) includes a shaft body. A driving connection part (120) is connected to one end of the substrate transferring shaft. The driving connection part delivers the driving force to the substrate transferring shaft. The driving connection part includes a driving connection part body and a locking part.;COPYRIGHT KIPO 2013;[Reference numerals] (110) Driving part