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SIOX NANOPARTICLE MANUFACTURING APPARATUS INCLUDING CRUCIBLE FOR SILICON MELTING HAVING SLIDING TYPE TAPPING STRUCTURE AND MANUFACTURIGN METHOD OF SIOX NANO PARTICLE USING THE SAME
SIOX NANOPARTICLE MANUFACTURING APPARATUS INCLUDING CRUCIBLE FOR SILICON MELTING HAVING SLIDING TYPE TAPPING STRUCTURE AND MANUFACTURIGN METHOD OF SIOX NANO PARTICLE USING THE SAME
PURPOSE: A SiOx nanopowder manufacturing apparatus and a SiOx nanopowder manufacturing method using the same are provided to manufacture a SiOx nanopowder having a 50nm particle size with high purity at low cost in short time and to prevent silicone molten metal from being solidified on the bottom surface of a melting pot. CONSTITUTION: A method for manufacturing SiOx nanopowder comprises steps of: a step(S210) of charging silicone inside a silicone melting crucible; a step(S220) of forming a silicone molten metal through an inductive heating process; a step(S230) of spraying gas to directly contact the surface of the silicone molten metal; a step(S240)of collecting SiOx particles through cooling and condensing SiOx vapors which become volatilized in the reaction between the silicone molten metal and the sprayed gas; and a step(S250) of pulling out an opening and closing bar for tapping which is slide-inserted and cleaning the bar. While the grip protrusion of the opening and closing bar for tapping is gripped by a gripper, the opening and closing bar for tapping is ejected outside the tapping container. Both side surfaces that face the opening and closing bar for tapping contain a reverse tapered cross section. [Reference numerals] (AA) Start; (BB) End; (S210) Charging silicone; (S220) Inductive heating; (S230) Spraying gas; (S240) Collecting; (S250) Washing
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