A treatment solution for preventing a pattern collapse in a fine metal structure body and a method for producing a fine metal structure body using the same

摘要

There are provided a fine metal structure suppressing processing liquid containing at least one compound selected from the group consisting of an ammonium halide having a fluoroalkyl group, a betaine compound having a fluoroalkyl group and an amine oxide compound having a fluoroalkyl group, and a method of Preparation of a fine metal structure using this is provided.