A method for associating a pupils facet of an aperture diaphragm beveled mirror is a part of a projection exposure system to a field facet of a field facets mirror of the illumination optics

摘要

A method for associating a pupils facet (11) of an aperture diaphragm beveled mirror (10) is a part (23; 37) of a projection exposure apparatus (1) to a field facet (7) of a field facets mirror (6) of the illumination optics (23; 37) for defining an illumination channel for a partial bundle of the illumination light (3), which, starting from a light source (2) on the field facet (7) and on the assigned to the method by means of the pupils facet (11) to one of the illumination optics (23; 37) illuminated object field (18) is reflected, with the following steps:– Identifying (26) of at least one illumination parameters, with the illumination of the object field (18) can be evaluated,– Specifying (27) of an illumination channel dependent evaluation function for the evaluation of a possible illumination channel, thus a possible combination of exactly one of the field facets (7) with exactly one of the pupil facets (11) for the guidance of the partial bundle of the illumination light (3), depending on the selected illumination parameters,– Specifying (28) of a weighting - target area of evaluation variables as a result of the evaluation function,– Selecting (34) of those illumination channels, the evaluation quantity within the..