Measuring probe for measuring thickness of thin layer in stationary device, has coil unit associated with outer face of housing, which is arranged facing spherical cap and is provided with disc-shaped support arranged with Archimedean coil

摘要

The measuring probe (11) has a housing (14) with a sensor element (17) which is provided along the longitudinal axis (16) and is movably received in the housing. A coil unit (44) is associated with the outer face of the housing, facing the spherical cap (21) arranged in the longitudinal axis. The coil unit associated with the spherical cap is provided with a disc-shaped or annular support (49) arranged with an Archimedean coil (51). Independent claims are included for the following: (1) sensor element; and (2) method for manufacturing sensor element.