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Device e.g. piezoresistive force sensor for converting force into electrical signal, introduces total force of force introduction element into the sensitive layer over force introduction surfaces
Device e.g. piezoresistive force sensor for converting force into electrical signal, introduces total force of force introduction element into the sensitive layer over force introduction surfaces
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机译:设备例如用于将力转换为电信号的压阻力传感器,将力引入元件的总力引入力引入表面上方的敏感层中
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摘要
The device (1) has a flat substrate (10) which is arranged with a sensitive layer (12) such that the force (22) introduced into the sensitive layer is converted into an electrical signal. The total force of the force introduction element (20) is introduced into the sensitive layer over force introduction surfaces. The insulation layer (14) and patterned layer are arranged between the sensitive layer and force introduction element.
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