首页> 外国专利> Apparatus useful for clamping drive belt, comprises drive for transmitting rotational movement on transport roller in transport path, system for vacuum treatment for transporting disc-shaped substrates, and clamping devices with belt roller

Apparatus useful for clamping drive belt, comprises drive for transmitting rotational movement on transport roller in transport path, system for vacuum treatment for transporting disc-shaped substrates, and clamping devices with belt roller

机译:用于夹紧传动带的设备,包括用于在输送路径中在输送辊上传递旋转运动的驱动器,用于输送圆盘形基板的真空处理系统以及带有皮带辊的夹持装置

摘要

Apparatus (1) for clamping a drive belt (2), comprises: a drive (3) for transmitting a rotational movement on at least one transport roller (4) in a transport path (5); a system for vacuum treatment for transporting, preferably disc-shaped substrates; a clamping device with a belt roller, preferably a clamping roller, which moves in the plane, lengthening the traveling path of the drive belt. The device has two lever-like- and movable clamping devices, between which the clamping force is transmitted equally via a force coupling along a force line. The drive belt comprises belt rollers. Apparatus (1) for clamping a drive belt (2), comprises: a drive (3) for transmitting a rotational movement on at least one transport roller (4) in a transport path (5); a system for vacuum treatment for transporting, preferably disc-shaped substrates; a clamping device with a belt roller, preferably a clamping roller, which moves in the plane, lengthening the traveling path of the drive belt. The device has two lever-like and movable clamping devices, between which the clamping force is transmitted equally via a force coupling along a force line. The drive belt comprises belt rollers arranged in a plane, which are connected either with a drive or the transport roller, or rotatable in a freestanding manner, wrapping around along a traveling path and transmitting the rotational movement of the belt rollers. The drive belt enclosed at the belt roller is tightened by a clamping force on the clamping device. The clamping device is axially symmetrical, and the clamping rollers of the clamping device run against each other on the drive belt. The symmetrical axis at the intersection of travel path sets up between the tension rollers and force line such that the drive belt in the device comprises an offset inside the travel path.
机译:用于夹紧传动带(2)的设备(1)包括:驱动器(3),用于在输送路径(5)中的至少一个输送辊(4)上传递旋转运动;用于输送优选盘状基底的真空处理系统;具有带辊的夹紧装置,优选地为夹紧辊,该夹紧装置在平面内移动,从而延长了传动带的行进路径。该装置具有两个杠杆状的和可移动的夹紧装置,在夹紧装置之间,夹紧力通过沿力线的力耦合均匀地传递。传动皮带包括皮带辊。用于夹紧传动带(2)的设备(1)包括:驱动器(3),用于在输送路径(5)中的至少一个输送辊(4)上传递旋转运动;用于输送优选盘状基底的真空处理系统;具有带辊的夹紧装置,优选地为夹紧辊,该夹紧装置在平面内移动,从而延长了传动带的行进路径。该装置具有两个杠杆状且可移动的夹紧装置,在夹紧装置之间,夹紧力通过沿力线的力耦合均匀地传递。传动带包括布置在平面中的皮带轮,皮带轮与驱动器或运输辊连接,或者以独立的方式可旋转,沿着行进路径环绕并传递皮带轮的旋转运动。封闭在皮带辊上的驱动皮带通过夹紧装置上的夹紧力被张紧。夹紧装置是轴向对称的,并且夹紧装置的夹紧辊在传动带上彼此抵靠。在行进路径的交点处的对称轴设置在张紧辊和力线之间,以使设备中的驱动皮带在行进路径内形成偏移。

著录项

  • 公开/公告号DE102011113353B3

    专利类型

  • 公开/公告日2013-01-31

    原文格式PDF

  • 申请/专利权人 VON ARDENNE ANLAGENTECHNIK GMBH;

    申请/专利号DE201110113353

  • 发明设计人 WANKE ROLAND;HENTSCHEL MICHAEL;

    申请日2011-09-15

  • 分类号B65G13/07;C23C14;

  • 国家 DE

  • 入库时间 2022-08-21 16:22:08

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