Telescopic arm for transporting bi-directional translational substrate within vacuum treatment equipment for aircraft engine, has clutches provided inside main tube to move telescopic pipes parallel to thrust units relative to tube

摘要

The telescopic arm has a substrate holder (9) that receives a substrate (10). A main tube (2) is connected with a wall of a vacuum chamber such that the wall is cylindrically protruded outside. The outer thrust units (3,4,6) are provided with clutches (15-18) moved outside of the main tube in longitudinal direction. The clutches are provided inside the main tube so that an outer telescopic pipe (7) and an inner telescopic pipe (8) are respectively moved in translational motion parallel to the outer thrust units and inner thrust units (11,12,20,21) relative to main tube.