Micromechanical component for deflecting light beams in e.g. pico projector, has assembly comprising torsion bars and bending bar, where torsion bars are suspended at drive body over bending bar aligned inclined to longitudinal direction

摘要

The component has a drive body (10) movable in a swinging motion along a drive axle by a drive device. A mirror and/or filter unit (12) is connected with the drive body over a link assembly. The mirror and/or filter unit is movably displaced in a self-swinging motion along the drive axle. The link assembly comprises torsion bars (18) and a bending bar (20), where the torsion bars are suspended at the drive body over the bending bar that is aligned inclined to a torsion bar longitudinal direction (16). A connector (14) is arranged between the mirror and/or filter unit and the bending bar. An independent claim is also included for a method for manufacturing a micromechanical component.