Optical system i.e. micro-lithographic projection exposure system, for manufacturing e.g. LCD, has lenses arranged relative to each other such that delay distribution is partly compensated by voltage-induced double refraction distribution

摘要

The system has a set of lens groups (510, 520) including a set from two set of lenses (511, 512, 521, 522). One of the two set of lenses is made of cubic crystalline material e.g. fluoride crystal such as calcium fluoride, and comprises equal crystal section, and another set of lenses comprises voltage-induced double refraction is made of amorphous material i.e. quartz glasses. The two set of lenses are arranged relative to each other such that a delay distribution resulting for one of the lens groups is partly compensated by voltage-induced double refraction distribution. An independent claim is also included for a method for micro-lithographic manufacturing of micro-structured components.