Apparatus for coupling illumination radiation in illumination optical system, for use in projection exposure system, has sensor element to do time-resolved detection of radiation source illumination radiation coupled in optical system

摘要

The apparatus (35) has several radiation sources (3a) for producing illuminating radiation (14). A coupling lens (37) couples illuminating radiation from the radiation sources in an illumination optical system. The coupling lens includes several adjustable beam guiding elements (36) and sensor elements (42) for detecting portion of the radiation sources coupled in the illumination optical system allowing illumination radiation. The sensor element performs time-resolved detection of illumination radiation coupled in the illumination optical system. Independent claims are included for the following: (1) illumination system; (2) method for adjusting illumination system; (3) method for illuminating object field; (4) metrology system; (5) projection exposure system; (6) method for manufacturing nano-structured component; and (7) method for measuring structured object in object field.