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IMAGING DEVICE, IMAGING METHOD, COMPENSATION OPTICAL DEVICE, AND ABERRATION CORRECTION METHOD

机译:成像设备,成像方法,补偿光学设备和像差校正方法

摘要

PROBLEM TO BE SOLVED: To have a simple configuration, and achieve imaging of a test object accommodating to multiwavelength while performing a highly accurate aberration correction.SOLUTION: The imaging device measures aberration of light having a first polarization component and a first wavelength, of return light from a test object to which measurement light is applied; controls a first spatial light modulator that corrects the aberration of the light having the first polarization component and the first wavelength, of the return light, to accommodate to the first wavelength on the basis of the measured aberration; controls a second spatial light modulator that corrects the aberration of light having a second polarization component and a second wavelength that are different from the first polarization component and the first wavelength, of the return light, to accommodate to the second wavelength on the basis of the measured aberration; and forms an image of the test object using the light with the aberration corrected by the second spatial light modulator.
机译:解决的问题:具有简单的配置,并在执行高精度像差校正的同时实现容纳多波长的测试对象的成像。来自施加了测量光的测试对象的光;控制第一空间光调制器,该第一空间光调制器基于所测量的像差来校正具有第一偏振分量和返回波长的第一波长的光的像差,以适应于第一波长;控制第二空间光调制器,该第二空间光调制器基于返回的光来校正返回光的具有与第一偏振分量和第一波长不同的第二偏振分量和第二波长的光的像差,以适应第二波长。测量的像差并使用具有由第二空间光调制器校正的像差的光形成测试对象的图像。

著录项

  • 公开/公告号JP2014108214A

    专利类型

  • 公开/公告日2014-06-12

    原文格式PDF

  • 申请/专利权人 CANON INC;

    申请/专利号JP20120263678

  • 发明设计人 NOZATO KOJI;

    申请日2012-11-30

  • 分类号A61B3/12;A61B3/10;

  • 国家 JP

  • 入库时间 2022-08-21 16:20:11

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