ION MASS SELECTOR, ION IRRADIATOR, SURFACE ANALYSIS DEVICE AND ION MASS SELECTION METHOD

摘要

PROBLEM TO BE SOLVED: To solve such a problem that it is required to adjust the passage energy depending on the ion mass, for controlling mass resolution independently from the time width of a trigger pulse, in a time-of-flight mass selector, but when the passage energy changes, trajectory of cluster ion incident on the time-of-flight mass selector also changes, and thereby the efficiency of cluster ion transmitting through the time-of-flight mass selector varies.;SOLUTION: A time-of-flight mass selector includes a first ion lens for focusing ions, a flight tube having an equipotential space into which ions incident from the first ion lens are introduced, a second ion lens for focusing the ions discharged from the flight tube, and a gate chopper for pulsing the ions focused by the second ion lens.;COPYRIGHT: (C)2014,JPO&INPIT