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MICROLENS ARRAY, LIGHT INTENSITY DISTRIBUTION UNIFORMIZATION ELEMENT HAVING THE SAME PROVIDED AND PROJECTION DEVICE HAVING LIGHT INTENSITY DISTRIBUTION UNIFORMIZATION ELEMENT
MICROLENS ARRAY, LIGHT INTENSITY DISTRIBUTION UNIFORMIZATION ELEMENT HAVING THE SAME PROVIDED AND PROJECTION DEVICE HAVING LIGHT INTENSITY DISTRIBUTION UNIFORMIZATION ELEMENT
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机译:米洛伦阵列,具有相同设置的光强度分布均匀化元件,并且投影装置具有光强度分布均匀化元件
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摘要
PROBLEM TO BE SOLVED: To provide a microlens array that has less optical loss and hardly causes degradation.SOLUTION: A microlens array 110 is formed by bonding a first microlens array 122 formed of resin and a second microlens array 126 formed of glass. The first microlens array is on a light incidence side, and the second microlens array 126 is on a light emergent side. Since a highly accurate formation is easily attained with the resin, an invalid part indicated by -marked 180 is narrow that does not function as a lens of the first microlens array 122. Therefore, an optical loss is less. Further, since the second microlens array 126 having light incident to the microlens array 110 converged is formed of the glass, degradation due to heat and the like is hardly caused.
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