INTERFERENCE OBJECTIVE LENS OPTICAL SYSTEM AND OPTICAL INTERFERENCE MEASUREMENT DEVICE HAVING THE SAME INTERFERENCE OBJECTIVE LENS OPTICAL SYSTEM

摘要

PROBLEM TO BE SOLVED: To achieve high accuracy of an optical interference measurement device by achieving a Mireau type interference object lens optical system for largely reducing flare light generated due to inner surface reflection in an objective lens, and improving the contrast of an interference optical image.;SOLUTION: In an interference objective lens optical system 15, an interference optical system 13 includes: a 1/4 wavelength plate 26 with a reference mirror 20 disposed in a direction orthogonal to the optical axis of an object lens 12 nearer at a measurement object W side than the top end of the objective lens; a half-mirror (film) 28 configured to branch the rays of light output from a light source 52 into a reference optical path via the reference mirror and a measurement optical path via the measurement object, and to multiplex reflected light from the reference mirror and reflected light from the measurement object, and to output it as interference light; a first polarizer 34 disposed between the objective lens and a light source; and a second polarizer 36 disposed in a crossed nicol state with respect to the first polarizer at the rear end side of the objective lens to which the interference light is emitted.;COPYRIGHT: (C)2014,JPO&INPIT